Semiconductors have revolutionized the electronics sector and become a vital component in modern technology. From computers and smartphones to pacemakers and military communications systems, ...

Wafer cleaning, once a rather mundane task as simple as dipping wafers in cleaning fluid, is emerging as one of the top major engineering challenges for manufacturing GAA FETs and 3D-ICs. With these ...

ACM’s Ultra C VI Tool Supports Most Semiconductor Clean Processes for Advanced Logic, DRAM and 3D NAND Manufacturing; Provides 50% More Throughput Than 12 Chamber Tool FREMONT, Calif., April 21, 2022 ...

This method has increased in popularity, overtaking traditional surface cleaning methods due to its capacity to be seamlessly integrated into existing in-line processes without adding time or extra ...

With advances in new technology it is getting more important to monitor all aspects of the influencing parameters in critical etch steps and utilize them as tuning knobs for within-wafer uniformity ...